Eco-friendly modular filter for efficient AMC control and reduced carbon impact in semiconductor plants
In the process of going smart, many semiconductor factories are beginning to discover that there are micro-contaminants in the environment that are invisible to the naked eye, which are suspended in the air and cause great harm to products, but traditional filtration methods such as HEPA or ULPA are difficult to remove effectively. It is therefore imperative that intelligent control mechanisms are put in place within the plant to address the AMC (Airborne Molecular Contamination) problem.
According to Pratt & Whitney technical expert, with the development of advanced semiconductor processes, dust suspended in the air can be effectively controlled through traditional filtration methods. However, other micro-contaminants, organic or inorganic, have a much greater impact on process yields than dust. In other words, high performance AMC micro-pollution control technology is one of the key elements in the development of 5nm advanced processes by major semiconductor manufacturers.
AMC is mainly divided into MA acidic substances, MB salty substances, MC condensation substances and MD doping substances, and H₂O₂、O₃ and other unclassifiable substances. These gaseous molecular contaminants, in terms of size, only need 5~25 molecular deposits to fill up the 5nm line width and cause damage to the wafer, which is the biggest problem faced by the semiconductor industry at present.
In order to solve this problem, the chemical filter industry has added a multi-effect chemical filter to the traditional dust filter, i.e. the traditional 3-in-1 chemical filter module. However, this has led to a major problem: to ensure a high level of performance, they use a large amount of PU glue to seal the filters inside the metal frame. On the one hand, the PU adhesive itself is a source of contamination, and on the other hand, it cannot be replaced because the metal and the filter material are stuck together, so it will only end up as a composite waste.
The environmentally friendly combination screen developed by Ruizhi has a very different look. We would like to summaries its many advantages. Firstly, it does not use PU rubber at all, thus saving the user 3% to 5% of the cost. Secondly, the frame is designed as a unique extraction or stacking type, which allows the user to replace only a single layer of filter material without removing the whole set of filters, making it relatively lightweight and safe. Thirdly, the modular frame is reusable and easy to replace, in contrast to traditional 3-in-1 chemical filters. Fourthly, the re usability of the filter media and frame reduces the cost of purchase by over 40% and the amount of waste by over 60%, which in turn reduces waste accumulation and subsequent disposal costs. Fifthly, the environmentally friendly filters allow only the filter media to be used as spares and the frame to be used repeatedly until it is worn out before it needs replenishing.
With the 3Rs - Reduce, Reuse and Recycle - as its core philosophy, Ruizhi aspires to achieve the goal of zero waste. The world is facing severe environmental issues such as climate change, global warming and frequent climate extremes, so mankind should not be satisfied with the "reuse economy" (which still generates waste), but needs to go further to achieve a "recycling economy", aiming to utilize 100% of raw materials and resources and not to generate any more waste, which is the new thinking that Filtration wants to bring to the industry.
In addition to the development of modular filters, Ruizhi is also actively promoting another product, the "Integrated AMC Chemical Filter", which loads acid, alkaline and TVOC adsorbing and decomposing materials into a carbon cloth material to make an integrated AMC chemical filter, which can efficiently remove AMC gaseous pollutants such as acid, alkaline, TVOC and ozone at the same time. Besides the product is also more cost effective and more environmentally friendly and energy efficient for the environment.
